ZEISS announces the new ZEISS Crossbeam 550 Samplefab, a focused ion beam scanning electron microscope (FIB-SEM) optimized for fully automated preparation of transmission electron microscopy (TEM) samples (lamellae). Built for efficiency and throughput in the semiconductor lab, ZEISS Crossbeam 550 Samplefab provides recipe-based automation for the routine TEM sample preparation work of bulk milling, lift-out and thinning at any number of target points on the sample.

蔡司宣布推出新的蔡司横梁550 Samplefab，这是一种聚焦离子束扫描电子显微镜（FIB-SEM），专为全自动制备透射电子显微镜（TEM）样品（薄片）而优化。蔡司横梁550 Samplefab专为半导体实验室的效率和吞吐量而建造，为常规TEM样品制备工作提供基于配方的自动化，包括在样品上任意数量的目标点进行批量研磨、提离和稀释。

The solution promises an automation yield of >90% for processing lamellae from bulk to TEM grid without operator intervention. Automated checks allow human interventions to ensure no lamellae are lost during processing, driving lamella success rates towards 100%..

该解决方案有望在无需操作员干预的情况下，将薄片从大块加工到TEM网格，自动化产率>90%。自动检查允许人为干预，以确保在加工过程中不会丢失薄片，从而使薄片成功率达到100%。。

TEM imaging provides essential information for understanding semiconductor device defects and improving process yield. However, the accuracy of the data from TEM analysis is dependent upon producing high-quality lamellae accurately, repeatedly and with high throughput.

TEM成像为理解半导体器件缺陷和提高工艺产量提供了重要信息。然而，TEM分析数据的准确性取决于准确，重复和高通量地产生高质量的薄片。

“To address the growing industry need for TEM sample preparation, we have built a dedicated FIB-SEM, the ZEISS Crossbeam 550 Samplefab. Our focus is to offer the most robust automation available on the market today, allowing fully unsupervised operation of down to 100 nm thin lamellae with high accuracy and throughput,” said Dr.

“为了满足行业对 TEM 样品制备日益增长的需求，我们构建了专用的 FIB-SEM，即蔡司 Crossbeam 550 Samplefab。我们的重点是提供当今市场上最强大的自动化技术，允许对低至 100 nm 的薄片进行完全无人监督的操作，具有高精度和通量，“博士说。

Thomas Rodgers, head of business sector electronics at ZEISS Microscopy. “The system’s user interface is completely new, designed for a rapid learning curve and intuitive operation by both novices and experts. With the new Crossbeam 550 Samplefab FIB, customers can automatically process ten lamellae in under eight hours, starting from a bulk sample and ending with a thinned lamella ready for the TEM.”.

蔡司显微镜公司商业部门电子主管托马斯·罗杰斯（ThomasRodgers）。“该系统的用户界面是全新的，旨在为新手和专家提供快速的学习曲线和直观的操作。使用新的横梁550 Samplefab FIB，客户可以在不到8小时的时间内自动处理十个薄片，从批量样品开始，到为TEM准备的薄薄片结束。”。

ZEISS Crossbeam 550 Samplefab uses the Gemini 2 electron column, allowing the operator to observe the sample live with the SEM during FIB milling to achieve the highest final lamella quality and endpointing outcomes when thinner samples are required than what is provided by the automation.

蔡司横梁550 Samplefab使用Gemini 2电子柱，允许操作员在纤维铣削过程中使用SEM实时观察样品，以在需要比自动化提供的样品更薄的样品时获得最高的最终薄片质量和终点结果。

“Our FIB column is extremely stable, and while we have an automated calibration routine, users report rarely needing to calibrate or align the system over multiple weeks, especially if it is working on routine processes. This dramatically reduces the operator effort, and the time spent setting up the tool prior to an automated run,” said Rodgers.

Rodgers说：“我们的FIB列非常稳定，虽然我们有一个自动校准程序，但用户报告说很少需要在数周内校准或校准系统，尤其是在常规过程中。这大大减少了操作员的工作量，以及在自动运行之前设置工具所花费的时间。”。

“What’s more, the workflow is so robust that dozens of lamellae can be created using a single probe tip, which only needs reshaping after a few days of heavy use. Tip can be sharpened with a simple reshaping operation that takes less than 30 minutes, and the needle can be reshaped multiple times before needing to be replaced, where a new tip exchange also takes only half an hour.

“更重要的是，该工作流程非常强大，使用单个探针尖端可以创建数十个薄片，只需在大量使用几天后进行重塑。只需不到30分钟的简单重塑操作，即可将尖端锐化，并且可以在需要更换针之前多次重塑针，而更换新的尖端也只需半小时。

This dramatically increases the productive uptime of the tool, and lowers the cost spent on consumables.”.

这大大增加了工具的生产正常运行时间，并降低了耗材的成本。”。

About ZEISS

关于蔡司

ZEISS is an internationally leading technology enterprise operating in the fields of optics and optoelectronics. In the previous fiscal year, the ZEISS Group generated annual revenue totaling 10 billion euros in its four segments Semiconductor Manufacturing Technology, Industrial Quality & Research, Medical Technology and Consumer Markets (status: 30 September 2023)..

蔡司是一家国际领先的光学和光电子技术企业。在上一个财政年度，蔡司集团在其半导体制造技术、工业质量与研究、医疗技术和消费市场四个领域的年收入总计100亿欧元（现状：2023年9月30日）。。

For its customers, ZEISS develops, produces and distributes highly innovative solutions for industrial metrology and quality assurance, microscopy solutions for the life sciences and materials research, and medical technology solutions for diagnostics and treatment in ophthalmology and microsurgery.

蔡司为其客户开发、生产和分销高度创新的工业计量和质量保证解决方案、生命科学和材料研究的显微镜解决方案以及眼科和显微外科诊断和治疗的医疗技术解决方案。

The name ZEISS is also synonymous with the world's leading lithography optics, which are used by the chip industry to manufacture semiconductor components. There is global demand for trendsetting ZEISS brand products such as eyeglass lenses, camera lenses and binoculars..

蔡司这个名字也是世界领先的光刻光学元件的同义词，芯片行业使用这种光学元件来制造半导体元件。全球对引领潮流的蔡司品牌产品有需求，如眼镜镜片、相机镜片和双筒望远镜。。

With a portfolio aligned with future growth areas like digitalization, healthcare and Smart Production and a strong brand, ZEISS is shaping the future of technology and constantly advancing the world of optics and related fields with its solutions. The company's significant, sustainable investments in research and development lay the foundation for the success and continued expansion of ZEISS' technology and market leadership.

凭借与数字化、医疗保健和智能生产等未来增长领域相一致的投资组合以及强大的品牌，蔡司正在塑造技术的未来，并通过其解决方案不断推动光学和相关领域的发展。该公司在研发方面的大量可持续投资为蔡司技术和市场领导地位的成功和持续扩大奠定了基础。

ZEISS invests 15 percent of its revenue in research and development – this high level of expenditure has a long tradition at ZEISS and is also an investment in the future..

蔡司将其收入的15%投资于研发——这种高水平的支出在蔡司有着悠久的传统，也是对未来的投资。。

With over 44,000 employees, ZEISS is active globally in around 50 countries with more than 60 sales and service locations, 35 research and development facilities, and 35 production facilities worldwide (status: 31 March 2024). Founded in 1846 in Jena, the company is headquartered in Oberkochen, Germany.

蔡司拥有44000多名员工，活跃于全球约50个国家，拥有60多个销售和服务地点、35个研发设施和35个生产设施（状态：2024年3月31日）。该公司于1846年在耶拿成立，总部位于德国奥伯科亨。

The Carl Zeiss Foundation, one of the largest foundations in Germany committed to the promotion of science, is the sole owner of the holding company, Carl Zeiss AG..

卡尔·蔡司基金会是德国最大的致力于促进科学发展的基金会之一，是控股公司卡尔·蔡司公司的唯一所有者。。